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Time-and space-resolved electric potentials in parallel-plate radio-frequency plasma
- Source :
- Journal of Applied Physics. May 15, 2003, Vol. 93 Issue 10, 5882-5892
- Publication Year :
- 2003
-
Abstract
- A low-input capacitance emissive probe heated by a CO2 laser is used to investigate frequency-modulated electric potentials in a radio-frequency (rf) glow discharge plasma. The results were found consistent with a one-dimensional model for potential and electric field distribution in the sheath region.
- Subjects :
- Electric fields -- Research
Plasma physics -- Research
Physics
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 93
- Issue :
- 10
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.122717713