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Study of low-frequency charge pumping on thin stacked dielectrics

Authors :
Weintraub, Chad E.
Misra Veena
Ganem, J.
Masson, Pascal
Hauser, John R.
Vogel, Eric
Nian Yang
Wortman, Jimmie J.
Source :
IEEE Transactions on Electron Devices. Dec, 2001, Vol. 48 Issue 12, p2754, 8 p.
Publication Year :
2001

Abstract

The effects of dc tunneling currents on low frequency charge pumping technique on thin stacked gate dielectrics are discussed. A procedure to remove these components from the measured substrate current is outlined.

Details

Language :
English
ISSN :
00189383
Volume :
48
Issue :
12
Database :
Gale General OneFile
Journal :
IEEE Transactions on Electron Devices
Publication Type :
Academic Journal
Accession number :
edsgcl.121450205