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Study of low-frequency charge pumping on thin stacked dielectrics
- Source :
- IEEE Transactions on Electron Devices. Dec, 2001, Vol. 48 Issue 12, p2754, 8 p.
- Publication Year :
- 2001
-
Abstract
- The effects of dc tunneling currents on low frequency charge pumping technique on thin stacked gate dielectrics are discussed. A procedure to remove these components from the measured substrate current is outlined.
- Subjects :
- Metal oxide semiconductor field effect transistors -- Analysis
Metal oxide semiconductor field effect transistors -- Electric properties
Metal oxide semiconductor field effect transistors -- Design and construction
Dielectrics -- Usage
Dielectrics -- Analysis
Business
Electronics
Electronics and electrical industries
Subjects
Details
- Language :
- English
- ISSN :
- 00189383
- Volume :
- 48
- Issue :
- 12
- Database :
- Gale General OneFile
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.121450205