Developing a soft X-ray projection lithography tool

Authors :: Stulen, Richard H.
Freeman, Richard R.
Source :: AT & T Technical Journal. Nov-Dec, 1991, Vol. v70 Issue n6, p37, 12 p.
Publication Year :: 1991

Subjects :: X-Rays
Photolithography
Circuit Design
Packaging Density
Research and Development
New Technique
Chip Packaging
Laser
Integrated Circuit Fabrication
Sandia Laboratories
Lucent Technologies Inc. Bell Laboratories -- Research
United States. Sandia National Laboratories -- Research

Tools