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Photoresist stripper recovery addresses waste disposal issue
- Source :
- Microlithography World. May, 2004, Vol. 13 Issue 2, p26, 1 p.
- Publication Year :
- 2004
-
Abstract
- Mallinckrodt Baker Inc. has introduced an expanded photoresist-stripper recovery program to collect and reformulate recovered components into new strippers. The program is intended to reduce fab costs and address the […]
Details
- Language :
- English
- ISSN :
- 1074407X
- Volume :
- 13
- Issue :
- 2
- Database :
- Gale General OneFile
- Journal :
- Microlithography World
- Publication Type :
- Periodical
- Accession number :
- edsgcl.117775699