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Design and modeling of a micromachined high-Q tunable capacitor with large tuning range and a vertical planar spiral inductor
- Source :
- IEEE Transactions on Electron Devices. March, 2003, Vol. 50 Issue 3, p730, 10 p.
- Publication Year :
- 2003
-
Abstract
- Design and modeling of a micromachined high-Q tunable capacitor with large tuning range and a vertical planar spiral inductor, implemented in a microelectromechanical system, is described and discussed.
Details
- Language :
- English
- ISSN :
- 00189383
- Volume :
- 50
- Issue :
- 3
- Database :
- Gale General OneFile
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.109254756