Handbook of Silicon Based MEMS Materials and Technologies

MLA

Markku Tilli, et al. Handbook of Silicon Based MEMS Materials and Technologies. Elsevier, 2020. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsebk&AN=2253331&authtype=sso&custid=ns315887.

APA

Markku Tilli, Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Motooka, & Veikko Lindroos. (2020). Handbook of Silicon Based MEMS Materials and Technologies. Elsevier.

Chicago

Markku Tilli, Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Motooka, and Veikko Lindroos. 2020. Handbook of Silicon Based MEMS Materials and Technologies. Micro and Nano Technologies. Chantilly: Elsevier. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsebk&AN=2253331&authtype=sso&custid=ns315887.