Back to Search
Start Over
Impacts of post-deposition annealing on hole trap generation at SiO2/p-type GaN MOS interfaces
- Source :
- Applied Physics Express, Vol 17, Iss 8, p 081002 (2024)
- Publication Year :
- 2024
- Publisher :
- IOP Publishing, 2024.
-
Abstract
- In this study, impacts of post-deposition annealing (PDA) on hole trap generation at SiO _2 /p-GaN MOS interfaces are investigated. While the surface potential is strongly pinned due to severe hole trapping after 800 °C PDA, successful hole accumulation is observed when PDA is performed at 200 °C. The density of interface hole traps causing surface potential pinning, extracted from the hump in capacitance–voltage curves, is about 10 ^12 cm ^–2 with 200 °C PDA, while over 10 ^13 cm ^–2 when the PDA temperature exceeds 600 °C, regardless of the annealing ambient. Consequently, the origin of these hole traps is speculated to be defects generated by thermal effects.
- Subjects :
- gallium nitride
MOSFETs
hole trap
Physics
QC1-999
Subjects
Details
- Language :
- English
- ISSN :
- 18820786
- Volume :
- 17
- Issue :
- 8
- Database :
- Directory of Open Access Journals
- Journal :
- Applied Physics Express
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.bfbae7deb564a7098860466b2c0efb5
- Document Type :
- article
- Full Text :
- https://doi.org/10.35848/1882-0786/ad65b3