Characterisation and modelling of nonlinear resonance behaviour on very-high-frequency silicon nanoelectromechanical resonators

This paper reports a novel method to build a model for nonlinear resonance behaviour of very-high-frequency (VHF) silicon nanoelectromechanical (NEM) resonators, measured via 1-ω mixing resonance measurements. Systematic fitting results for the experimental data of a 1.5-μm-long beams have been achieved with explicit explanation of the amount of intrinsic mechanical nonlinearity and nonlinear voltage-tuning effect. Asymmetric line shape and onset of hysteresis on nonliner resonance behavour have been well demonstrated with less fitting errors. The development of a modelling method of nanoscale resonator devices which includes nonlinear response is beneficial for seamless technology transfer from individual devices to integrated systems in the future.