Low Noise Interface ASIC of Micro Gyroscope with Ball-disc Rotor

A low noise interface ASIC for micro gyroscope with ball-disc rotor is realized in 0.5µm CMOS technology. The interface circuit utilizes a transimpedance pre-amplifier which reduces input noise. The proposed interface achieves 0.003°/s/Hz1/2 noise density and 0.003°/s sensitivity with ±100°/s measure range. The functionality of the full circuit, including circuit analysis, noise analysis and measurement results, has been demonstrated.