BEOL Integrated Ferroelectric HfO₂-Based Capacitors for FeRAM: Extrapolation of Reliability Performance to Use Conditions

MLA

R. Alcala, et al. “BEOL Integrated Ferroelectric HfO₂-Based Capacitors for FeRAM: Extrapolation of Reliability Performance to Use Conditions.” IEEE Journal of the Electron Devices Society, vol. 10, Jan. 2022, pp. 907–12. EBSCOhost, https://doi.org/10.1109/JEDS.2022.3198138.

APA

R. Alcala, M. Materano, P. D. Lomenzo, L. Grenouillet, T. Francois, J. Coignus, N. Vaxelaire, C. Carabasse, S. Chevalliez, F. Andrieu, T. Mikolajick, & U. Schroeder. (2022). BEOL Integrated Ferroelectric HfO₂-Based Capacitors for FeRAM: Extrapolation of Reliability Performance to Use Conditions. IEEE Journal of the Electron Devices Society, 10, 907–912. https://doi.org/10.1109/JEDS.2022.3198138

Chicago

R. Alcala, M. Materano, P. D. Lomenzo, L. Grenouillet, T. Francois, J. Coignus, N. Vaxelaire, et al. 2022. “BEOL Integrated Ferroelectric HfO₂-Based Capacitors for FeRAM: Extrapolation of Reliability Performance to Use Conditions.” IEEE Journal of the Electron Devices Society 10 (January): 907–12. doi:10.1109/JEDS.2022.3198138.