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On the Spatial Uniformity of the Degree of Ionization in a Helium ECR Plasma Produced under a Simple Cusp Field
- Source :
- Atoms, Vol 7, Iss 2, p 49 (2019)
- Publication Year :
- 2019
- Publisher :
- MDPI AG, 2019.
-
Abstract
- Production of a plasma that has a large degree of ionization (DOI), volume, and spatial and temporal uniformities is a challenge for the improvement of the performance of plasma-based vapor deposition processes. As a potential candidate for the discharge, we investigate plasma parameters arising in helium electron cyclotron resonance (ECR) discharges due to a simple cusp field. Two-dimensional distributions of helium atom emission-line intensities were measured using spectroscopy with multiple viewing chords and then de-convoluted by Abel inversion. The local plasma parameters, including the atomic density, were evaluated using collisional-radiative model analysis. The DOI calculated from the electron and atomic densities reached up to 35% and, in most of the region inside the ECR surface, it was more than 10%.
Details
- Language :
- English
- ISSN :
- 22182004
- Volume :
- 7
- Issue :
- 2
- Database :
- Directory of Open Access Journals
- Journal :
- Atoms
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.9c16f53ced14b3faed425df6bca2070
- Document Type :
- article
- Full Text :
- https://doi.org/10.3390/atoms7020049