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On the Spatial Uniformity of the Degree of Ionization in a Helium ECR Plasma Produced under a Simple Cusp Field

Authors :
Akira Ueda
Taiichi Shikama
Yohei Iida
Masahiro Hasuo
Source :
Atoms, Vol 7, Iss 2, p 49 (2019)
Publication Year :
2019
Publisher :
MDPI AG, 2019.

Abstract

Production of a plasma that has a large degree of ionization (DOI), volume, and spatial and temporal uniformities is a challenge for the improvement of the performance of plasma-based vapor deposition processes. As a potential candidate for the discharge, we investigate plasma parameters arising in helium electron cyclotron resonance (ECR) discharges due to a simple cusp field. Two-dimensional distributions of helium atom emission-line intensities were measured using spectroscopy with multiple viewing chords and then de-convoluted by Abel inversion. The local plasma parameters, including the atomic density, were evaluated using collisional-radiative model analysis. The DOI calculated from the electron and atomic densities reached up to 35% and, in most of the region inside the ECR surface, it was more than 10%.

Details

Language :
English
ISSN :
22182004
Volume :
7
Issue :
2
Database :
Directory of Open Access Journals
Journal :
Atoms
Publication Type :
Academic Journal
Accession number :
edsdoj.9c16f53ced14b3faed425df6bca2070
Document Type :
article
Full Text :
https://doi.org/10.3390/atoms7020049