Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

MLA

Zhenming Liu, et al. “Multi-Coefficient Eigenmode Operation—breaking through 10°/h Open-Loop Bias Instability in Wideband Aluminum Nitride Piezoelectric BAW Gyroscopes.” Microsystems & Nanoengineering, vol. 9, no. 1, Feb. 2023, pp. 1–11. EBSCOhost, https://doi.org/10.1038/s41378-023-00486-3.

APA

Zhenming Liu, Haoran Wen, & Farrokh Ayazi. (2023). Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes. Microsystems & Nanoengineering, 9(1), 1–11. https://doi.org/10.1038/s41378-023-00486-3

Chicago

Zhenming Liu, Haoran Wen, and Farrokh Ayazi. 2023. “Multi-Coefficient Eigenmode Operation—breaking through 10°/h Open-Loop Bias Instability in Wideband Aluminum Nitride Piezoelectric BAW Gyroscopes.” Microsystems & Nanoengineering 9 (1): 1–11. doi:10.1038/s41378-023-00486-3.