A healable amino silane self-assembled monolayer incorporating polymer capped palladium nanoclusters and its application as the copper diffusion barrier layer on silicon wafer

Self-assembled monolayers (SAMs) with short organic chains terminated with specific functional groups are attractive for modifying surface properties for a variety of applications, including being a copper diffusion barrier layer on Si wafer. However, SAM formation is process-sensitive and ideal SAM is difficult to obtain, both of which need to carefully deal with before practical use. Herein we developed a system to achieve seamless electroless deposited copper (ELD Cu) film on an amino-terminated silane SAM modified Si wafer with the help of a bifunctional polyvinyl alcohol-capped Pd nanocluster (PVA-Pd) catalyst. The PVA-Pd acts as a catalyst for ELD Cu as well as a healing agent to fix defects of the amino silane SAM. The sheet resistance, cross-sectional morphology analysis and adhesion of ELD Cu on the Si wafer are extensively studied. By controlling the abundancy of PVA in PVA-Pd, the diffusion barrier property of a flawed amino-terminated silane SAM remains reliably effective even after a 500 °C rapid thermal annealing (RTA), evidencing the superior healing function of PVA. The whole thickness of the PVA-Pd/amino-terminated silane SAM before and after RTA is 〜6 nm and 〜2 nm, respectively, which is applicable for advanced microelectronic manufacturing.