A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

MLA

Xiaoyang Zhang, et al. “A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph.” Micromachines, vol. 6, no. 12, Dec. 2015, pp. 1876–89. EBSCOhost, https://doi.org/10.3390/mi6121460.

APA

Xiaoyang Zhang, Liang Zhou, & Huikai Xie. (2015). A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph. Micromachines, 6(12), 1876–1889. https://doi.org/10.3390/mi6121460

Chicago

Xiaoyang Zhang, Liang Zhou, and Huikai Xie. 2015. “A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph.” Micromachines 6 (12): 1876–89. doi:10.3390/mi6121460.