Linear frequency tuning in an LC-resonant system using a C–V response controllable MEMS varactor

Abstract This paper proposes a device level solution to achieve linear frequency tuning with respect to a tuning voltage (V tune ) sweep in an inductor (L)–capacitor (C) resonant system. Since the linearity of the resonant frequency vs. tuning voltage (f–V) relationship in an LC-resonant system is closely related to the C–V response characteristic of the varactor, we propose a C–V response tunable varactor to realize the linear frequency tuning. The proposed varactor was fabricated using microelectromechanical system (MEMS) surface micromachining. The fabricated MEMS varactor has the ability to dynamically change the C–V response characteristic according to a curve control voltage (V curve-control ). When V curve-control was increased from zero to 9 V, the C–V response curve was changed from a linear to a concave form (i.e., the capacitance decreased quickly in the low tuning voltage region and slowly in the high tuning voltage region). This change in the C–V response characteristic resulted in a change in the f–V relationship, and we successfully demonstrated almost perfectly linear frequency tuning in the LC-resonant system, with a linearity factor of 99.95%.