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Structural optimization and simulation of piezoelectric- piezoresistive coupled MEMS steady-state electric field sensor

Authors :
Guote Liu
Yuanhao Ye
Bing Luo
Yu Gu
Weijia Zheng
Sijun Chen
Source :
Frontiers in Energy Research, Vol 10 (2023)
Publication Year :
2023
Publisher :
Frontiers Media S.A., 2023.

Abstract

Abstract: In view of the problems of large volume, high energy consumption and difficult maintenance of electric field measurement sensors in existing power systems, non-contact miniature electric field sensors have become a hot topic in current research. In this paper, a MEMS miniature electric field measurement sensor model based on the principle of piezoelectric-piezoresistive coupling is constructed, and the sensor structure is optimized by analyzing the steady-state characteristics of the piezoelectric material and semiconductor membrane of the sensor. The input and output characteristics of the sensor were tested. The test results show that the sensor has excellent mechanical strain capacity, and the output voltage of the sensor has a linear relationship with the electric field strength, thus verifying the feasibility of the sensor measurement in the electric field. The research results will provide some reference for the development of contactless coupled sensors.

Details

Language :
English
ISSN :
2296598X
Volume :
10
Database :
Directory of Open Access Journals
Journal :
Frontiers in Energy Research
Publication Type :
Academic Journal
Accession number :
edsdoj.8ff7da4f8d634aa3ba8904a2f9d9338b
Document Type :
article
Full Text :
https://doi.org/10.3389/fenrg.2022.1006777