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Wafer-scale and universal van der Waals metal semiconductor contact

Authors :
Lingan Kong
Ruixia Wu
Yang Chen
Ying Huangfu
Liting Liu
Wei Li
Donglin Lu
Quanyang Tao
Wenjing Song
Wanying Li
Zheyi Lu
Xiao Liu
Yunxin Li
Zhiwei Li
Wei Tong
Shuimei Ding
Songlong Liu
Likuan Ma
Liwang Ren
Yiliu Wang
Lei Liao
Xidong Duan
Yuan Liu
Source :
Nature Communications, Vol 14, Iss 1, Pp 1-8 (2023)
Publication Year :
2023
Publisher :
Nature Portfolio, 2023.

Abstract

Laminated van der Waals (vdW) metallic electrodes can improve the contact of 2D electronic devices, but their scalability is usually limited by the transfer process. Here, the authors report a strategy to deposit vdW contacts onto various 2D and 3D semiconductors at the wafer scale.

Subjects

Subjects :
Science

Details

Language :
English
ISSN :
20411723
Volume :
14
Issue :
1
Database :
Directory of Open Access Journals
Journal :
Nature Communications
Publication Type :
Academic Journal
Accession number :
edsdoj.8f423baac9f44241b7e3d6e6190d8554
Document Type :
article
Full Text :
https://doi.org/10.1038/s41467-023-36715-6