Modelling and compensation of rate‐dependent hysteresis in piezoelectric actuators based on a modified Madelung model

Abstract Based on the principle of weight superposition, a modified Madelung model is proposed. By combining the signal delay response characteristics (SDRC), a dynamic model and its inverse model are established to describe and compensate for the rate‐dependent hysteresis phenomenon of the piezoelectric actuators (PEAs). The effectiveness of the proposed method is verified by experiments, and the results show that the hysteresis nonlinearity of the PEA is basically eliminated, with the normalized root‐mean‐square error of 0.64% under the excitation of multi‐frequency superposition signal.