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Large-area integration of two-dimensional materials and their heterostructures by wafer bonding
- Source :
- Nature Communications, Vol 12, Iss 1, Pp 1-11 (2021)
- Publication Year :
- 2021
- Publisher :
- Nature Portfolio, 2021.
-
Abstract
- The existing integration approaches for 2D materials often degrade material properties and are not compatible with industrial processing. Here, the authors devise an adhesive wafer bonding strategy to transfer and stack monolayers, suitable for back end of the line integration of 2D materials.
- Subjects :
- Science
Subjects
Details
- Language :
- English
- ISSN :
- 20411723
- Volume :
- 12
- Issue :
- 1
- Database :
- Directory of Open Access Journals
- Journal :
- Nature Communications
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.8af99583e0ae4934b663750930c1b923
- Document Type :
- article
- Full Text :
- https://doi.org/10.1038/s41467-021-21136-0