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Large-area integration of two-dimensional materials and their heterostructures by wafer bonding

Authors :
Arne Quellmalz
Xiaojing Wang
Simon Sawallich
Burkay Uzlu
Martin Otto
Stefan Wagner
Zhenxing Wang
Maximilian Prechtl
Oliver Hartwig
Siwei Luo
Georg S. Duesberg
Max C. Lemme
Kristinn B. Gylfason
Niclas Roxhed
Göran Stemme
Frank Niklaus
Source :
Nature Communications, Vol 12, Iss 1, Pp 1-11 (2021)
Publication Year :
2021
Publisher :
Nature Portfolio, 2021.

Abstract

The existing integration approaches for 2D materials often degrade material properties and are not compatible with industrial processing. Here, the authors devise an adhesive wafer bonding strategy to transfer and stack monolayers, suitable for back end of the line integration of 2D materials.

Subjects

Subjects :
Science

Details

Language :
English
ISSN :
20411723
Volume :
12
Issue :
1
Database :
Directory of Open Access Journals
Journal :
Nature Communications
Publication Type :
Academic Journal
Accession number :
edsdoj.8af99583e0ae4934b663750930c1b923
Document Type :
article
Full Text :
https://doi.org/10.1038/s41467-021-21136-0