Advances in 3D silicon-based lithium-ion microbatteries

Abstract Miniaturization of modern microelectronics to accommodate the development of portable and smart devices requires independent energy storage that is compact, lightweight, reliable, and integrable on-chip. Three-dimensional lithium-ion microbatteries are considered as promising candidates to fill the role, owing to their high energy and power density. Combined with silicon as a high-capacity anode material, the performance of the microbatteries can be further enhanced. In this review, the latest developments in three-dimensional silicon-based lithium-ion microbatteries are discussed in terms of material compatibility, cell designs, fabrication methods, and performance in various applications. We highlight the relation between device architecture and performance as well as comparison between different fabrication technologies. Finally, we suggest possible future studies based on the current development status to provide a research direction towards further improved three-dimensional silicon-based lithium-ion microbatteries.