Wafer Delay Minimization in Scheduling Single-Arm Cluster Tools with Two-Space Process Modules

MLA

Chengyu Zou, et al. “Wafer Delay Minimization in Scheduling Single-Arm Cluster Tools with Two-Space Process Modules.” Mathematics, vol. 12, no. 12, June 2024, p. 1783. EBSCOhost, https://doi.org/10.3390/math12121783.

APA

Chengyu Zou, Siwei Zhang, Shan Zeng, Lei Gu, & Jie Li. (2024). Wafer Delay Minimization in Scheduling Single-Arm Cluster Tools with Two-Space Process Modules. Mathematics, 12(12), 1783. https://doi.org/10.3390/math12121783

Chicago

Chengyu Zou, Siwei Zhang, Shan Zeng, Lei Gu, and Jie Li. 2024. “Wafer Delay Minimization in Scheduling Single-Arm Cluster Tools with Two-Space Process Modules.” Mathematics 12 (12): 1783. doi:10.3390/math12121783.