Effect of Nitrogen / Argon Ratio on Microstructure and Properties of TiAlSiN Film Prepared by Multi-Arc Ion Plating

In order to improve the surface quality of die steel，TiAlSiN films were deposited on the surface of H13 die steel by multi-arc ion plating technology，and the effects of different nitrogen / argon ratios on the surface morphology，hardness，adhesion，corrosion resistance and oxidation resistance of the film were studied by means of scanning electron microscope，X-ray diffraction (XRD) and other methods.Results showed that when the ratio of nitrogen to argon was 8 ∶2，the film had less particle accumulation on the surface，the surface was smooth with high density，the bonding force between the film and the substrate also reached the maximum value of 20.4 N.With the increase of nitrogenargon ratio，the weight gain percentage of the sample after high-temperature oxidation showed a downward trend.When the nitrogen-argon ratio was 8 ∶2，the weight gain percentage was the lowest，and the sample had the best high-temperature oxidation resistance.And under this condition，the self-corrosion current density of the film reached the minimum value of 3.147×10-5A/cm2，and the corrosion resistance of the film was the best.