Study the Effect of Operating Temperature on Performance in Dry Scroll Vacuum Pump

The dry scroll vacuum pump is a kind of variable capacity dry vacuum pump that is applied in chemical, pharmaceutical, semiconductor, and scientific instruments. Analyzing the thermodynamic characteristics of the scroll vacuum pump and studying the impact of operating temperature on its consistent performance are necessary for the design and application of the cooling system of the scroll vacuum pump. Based on the dynamics mesh method, the computational fluid dynamics (CFD) simulation model of a multi-stage dry scroll vacuum pump is established in this study. Under the suction pressure of 1000 Pa, the simulation calculation is carried out at different operating temperatures of fixed scrolls (25 °C, 45 °C, and 65 °C). The results show that the pumping speed, the gas compression power, and the energy efficiency ratio are significantly affected by different temperatures. The operating temperature of the pump has been reduced from 65 °C to 25 °C, the pumping speed is increased by approximately 5.97%, the gas compression power is increased by approximately 4.32%, and the energy efficiency ratio is increased by approximately 1.745%. This research provides a transient simulation method using dynamic mesh technology for the study of the dry scroll vacuum pump, and the results can provide a theoretical basis for the design and application of the cooling system of the dry scroll vacuum pump.