Multistability of the Vibrating System of a Micro Resonator

Multiple attractors and their fractal basins of attraction can lead to the loss of global stability and integrity of Micro Electro Mechanical Systems (MEMS). In this paper, multistability of a class of electrostatic bilateral capacitive micro-resonator is researched in detail. First, the dynamical model is established and made dimensionless. Second, via the perturbating method and the numerical description of basins of attraction, the multiple periodic motions under primary resonance are discussed. It is found that the variation of AC voltage can induce safe jump of the micro resonator. In addition, with the increase of the amplitude of AC voltage, hidden attractors and chaos appear. The results may have some potential value in the design of MEMS devices.