Simulation-Based Analysis on Operational Control of Batch Processors in Wafer Fabrication

MLA

Pyung-Hoi Koo, and Rubén Ruiz. “Simulation-Based Analysis on Operational Control of Batch Processors in Wafer Fabrication.” Applied Sciences, vol. 10, no. 17, Aug. 2020, p. 5936. EBSCOhost, https://doi.org/10.3390/app10175936.

APA

Pyung-Hoi Koo, & Rubén Ruiz. (2020). Simulation-Based Analysis on Operational Control of Batch Processors in Wafer Fabrication. Applied Sciences, 10(17), 5936. https://doi.org/10.3390/app10175936

Chicago

Pyung-Hoi Koo, and Rubén Ruiz. 2020. “Simulation-Based Analysis on Operational Control of Batch Processors in Wafer Fabrication.” Applied Sciences 10 (17): 5936. doi:10.3390/app10175936.