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Wafer-scale functional circuits based on two dimensional semiconductors with fabrication optimized by machine learning

Authors :
Xinyu Chen
Yufeng Xie
Yaochen Sheng
Hongwei Tang
Zeming Wang
Yu Wang
Yin Wang
Fuyou Liao
Jingyi Ma
Xiaojiao Guo
Ling Tong
Hanqi Liu
Hao Liu
Tianxiang Wu
Jiaxin Cao
Sitong Bu
Hui Shen
Fuyu Bai
Daming Huang
Jianan Deng
Antoine Riaud
Zihan Xu
Chenjian Wu
Shiwei Xing
Ye Lu
Shunli Ma
Zhengzong Sun
Zhongyin Xue
Zengfeng Di
Xiao Gong
David Wei Zhang
Peng Zhou
Jing Wan
Wenzhong Bao
Source :
Nature Communications, Vol 12, Iss 1, Pp 1-8 (2021)
Publication Year :
2021
Publisher :
Nature Portfolio, 2021.

Abstract

Here, the authors demonstrate the application of machine learning to optimize the device fabrication process for wafer-scale 2D semiconductors, and eventually fabricate digital, analog, and optoelectrical circuits.

Subjects

Subjects :
Science

Details

Language :
English
ISSN :
20411723
Volume :
12
Issue :
1
Database :
Directory of Open Access Journals
Journal :
Nature Communications
Publication Type :
Academic Journal
Accession number :
edsdoj.6c132ca7f0c2440991fc669856c74e87
Document Type :
article
Full Text :
https://doi.org/10.1038/s41467-021-26230-x