Magnetic circuit optimisation and actuator suspension experiment of the 6‐DOF magnetic suspension platform for mini/micro LED

Abstract To improve the speed of mass transfer, a magnetic suspension platform (MSP) is used to transport the display chips. A novel 6‐DOF MSP is proposed in this paper. An improved Halbach array is used to supply the magnetic flux density. Two types of permanent magnets are utilised in the improved Halbach array. The smaller permanent magnet serves to consolidate the magnetic flux density, thereby enhancing the uniformity of the magnetic field. The finite element method is employed to analyse how variations in angle impact both the strength and uniformity of the magnetic flux density. The results show that the magnetisation direction of 45° is the most effective in terms of improving the uniformity and strength of the magnetic density. Finally, a 6‐DOF MSP prototype is manufactured. A magnetic density measurement experiment and a stable suspension experiment for the actuator are conducted. The results indicate an enhancement in the uniformity of the magnetic field within the air gap. Additionally, the maximum suspension positioning accuracy of the actuator is about 750 nm.