Dry Test Methods for Micropumps

The test in the production of microfluidic devices dedicated to medical applications poses several challenges in terms of contamination, reliability, and cost. The present article describes the Design-for-Testability approach used to make an insulin MEMS micropump that can be fully tested in production in a few seconds. Each key functional parameter of a positive displacement micropump with check valves is described together with detailed pneumatic test methods. The typical failure modes of the device are considered and tested experimentally to show that these methods can also be used for failure analysis and process control. A simplified Built-In-Self-Test is also presented. Finally, advanced methods to characterize the piezoelectric actuator are also described and tested.