Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror

MLA

Hao Zhang, et al. “Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror.” Sensors, vol. 15, no. 12, Dec. 2015, pp. 30991–1004. EBSCOhost, https://doi.org/10.3390/s151229840.

APA

Hao Zhang, Dacheng Xu, Xiaoyang Zhang, Qiao Chen, Huikai Xie, & Suiqiong Li. (2015). Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror. Sensors, 15(12), 30991–31004. https://doi.org/10.3390/s151229840

Chicago

Hao Zhang, Dacheng Xu, Xiaoyang Zhang, Qiao Chen, Huikai Xie, and Suiqiong Li. 2015. “Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror.” Sensors 15 (12): 30991–4. doi:10.3390/s151229840.