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PIN-PMN-PT Single Crystal 1-3 Composite-based 20 MHz Ultrasound Phased Array

Authors :
Wei Zhou
Tao Zhang
Jun Ou-Yang
Xiaofei Yang
Dawei Wu
Benpeng Zhu
Source :
Micromachines, Vol 11, Iss 5, p 524 (2020)
Publication Year :
2020
Publisher :
MDPI AG, 2020.

Abstract

Based on a modified dice-and-fill technique, a PIN-PMN-PT single crystal 1-3 composite with the kerf of 12 μm and pitch of 50 μm was prepared. The as-made piezoelectric composite material behaved with high piezoelectric constant (d33 = 1500 pC/N), high electromechanical coefficient (kt = 0.81), and low acoustic impedance (16.2 Mrayls). Using lithography and flexible circuit method, a 48-element phased array was successfully fabricated from such a piezoelectric composite. The array element was measured to have a central frequency of 20 MHz and a fractional bandwidth of approximately 77% at −6 dB. Of particular significance was that this PIN-PMN-PT single crystal 1-3 composite-based phased array exhibits a superior insertion loss compared with PMN-PT single crystal and PZT-5H-based 20 MHz phased arrays. The focusing and steering capabilities of the obtained phased array were demonstrated theoretically and experimentally. These promising results indicate that the PIN-PMN-PT single crystal 1-3 composite-based high frequency phased array is a good candidate for ultrasound imaging applications.

Details

Language :
English
ISSN :
2072666X
Volume :
11
Issue :
5
Database :
Directory of Open Access Journals
Journal :
Micromachines
Publication Type :
Academic Journal
Accession number :
edsdoj.5159515b00ab47e29a34f4ba9be87a10
Document Type :
article
Full Text :
https://doi.org/10.3390/mi11050524