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Initial Optimization of the Growth Conditions of GaAs Homo-Epitaxial Layers after Cleaning and Restarting the Molecular Beam Epitaxy Reactor
- Source :
- ACS Omega, Vol 8, Iss 36, Pp 32998-33005 (2023)
- Publication Year :
- 2023
- Publisher :
- American Chemical Society, 2023.
Details
- Language :
- English
- ISSN :
- 24701343
- Volume :
- 8
- Issue :
- 36
- Database :
- Directory of Open Access Journals
- Journal :
- ACS Omega
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.4fbba69a20fe44deb00689ce9fbbffe4
- Document Type :
- article
- Full Text :
- https://doi.org/10.1021/acsomega.3c04777