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Atomic Nature of the Growth Mechanism of Atomic Layer Deposited High‑κ Y2O3 on GaAs(001)‑4 × 6 Based on in Situ Synchrotron Radiation Photoelectron Spectroscopy
- Source :
- ACS Omega, Vol 3, Iss 2, Pp 2111-2118 (2018)
- Publication Year :
- 2018
- Publisher :
- American Chemical Society, 2018.
Details
- Language :
- English
- ISSN :
- 24701343
- Volume :
- 3
- Issue :
- 2
- Database :
- Directory of Open Access Journals
- Journal :
- ACS Omega
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.39ec327e5b934ca59abf14fdad78b00c
- Document Type :
- article
- Full Text :
- https://doi.org/10.1021/acsomega.7b01564