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Atomic Nature of the Growth Mechanism of Atomic Layer Deposited High‑κ Y2O3 on GaAs(001)‑4 × 6 Based on in Situ Synchrotron Radiation Photoelectron Spectroscopy

Authors :
Chiu-Ping Cheng
Wan-Sin Chen
Yi-Ting Cheng
Hsien-Wen Wan
Cheng-Yeh Yang
Tun-Wen Pi
Jueinai Kwo
Minghwei Hong
Source :
ACS Omega, Vol 3, Iss 2, Pp 2111-2118 (2018)
Publication Year :
2018
Publisher :
American Chemical Society, 2018.

Subjects

Subjects :
Chemistry
QD1-999

Details

Language :
English
ISSN :
24701343
Volume :
3
Issue :
2
Database :
Directory of Open Access Journals
Journal :
ACS Omega
Publication Type :
Academic Journal
Accession number :
edsdoj.39ec327e5b934ca59abf14fdad78b00c
Document Type :
article
Full Text :
https://doi.org/10.1021/acsomega.7b01564