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Interferometric microscale measurement of refractive index at VIS and IR wavelengths
- Source :
- SciPost Physics Core, Vol 7, Iss 3, p 059 (2024)
- Publication Year :
- 2024
- Publisher :
- SciPost, 2024.
-
Abstract
- Determination of refractive index of micro-disks of a calcinated ($1100^\circ$C in air) photo-resist SZ2080$^\mathrm{TM}$ was carried out using transmission and reflection spectroscopy. Interference fringes at specific wavenumbers/wavelengths were selected for determination of the optical thickness, hence, the refractive index when the thickness of micro-disks was measured by scanning electron microscopy (SEM). Refractive index of disks of $\sim 6\pm 1~\mu$m thickness were determined at visible and IR (2.5-13~$\mu$m) spectral ranges and where $2.2\pm 0.2$ at visible and IR wavelengths. Peculiarities of optical characterisation of micro-optical structures are discussed in view of possible uncertainties in the definition of geometric parameters, shape and mass density redistribution.
Details
- Language :
- English
- ISSN :
- 26669366
- Volume :
- 7
- Issue :
- 3
- Database :
- Directory of Open Access Journals
- Journal :
- SciPost Physics Core
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.398e39c5871a44f2886730124f82a772
- Document Type :
- article
- Full Text :
- https://doi.org/10.21468/SciPostPhysCore.7.3.059