Microfluidic Multifunctional Device based on Electrowetting-on-Dielectric

This paper presents a microfluidic multifunctional device, which can flexibly change the light input energy by using the effect of Electrowetting-on-Dielectric(EWOD). It can also realize multiple functions of variable aperture, variable optical attenuator and optical switch. The utility model has the advantages of simple structure, small volume, simple operation, wide application, flexibility and low cost. In this paper, the optical characteristics of the proposed microfluidic multifunctional device are analyzed and discussed, and the structure is optimized. The results show that the insertion loss of the proposed microfluidic multifunctional device is as small as only 0.014 dB. The aperture of the liquid variable aperture varies from 0 to 0.506 mm. In theory, the variable optical attenuator has a variable attenuation range of 0 ~100%, and the attenuation can reach 40.2 dB when the applied voltage is 91.1 V. The state microfluidic optical switch is " off" when there is no applied voltage and the state is " on" when the applied voltage is greater than 135 V.