Micro triboelectric ultrasonic device for acoustic energy transfer and signal communication

Miniaturizing efficient triboelectric nanogenerators remains a challenge. Here, the authors propose a MEMS-based micro triboelectric device for acoustic energy transfer and signal communication which is capable of generating the voltage signal of 16.8 mV and 12.7 mV through oil and sound-attenuation medium respectively with 63kPa at 1 MHz ultrasound input.