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A micro-thin-film getter–heater unit for high vacuum capsulation of MEMS devices
- Source :
- AIP Advances, Vol 12, Iss 1, Pp 015105-015105-7 (2022)
- Publication Year :
- 2022
- Publisher :
- AIP Publishing LLC, 2022.
-
Abstract
- In this paper, we proposed a micro-getter unit with a square thin-film getter formed atop a thin-film heater for vacuum packaging of a Micro-Electro-Mechanical System (MEMS) device. This innovation through an integrated module unit can be fabricated by MEMS compatible processes and can be sealed together with a MEMS device by wafer level package technology sequentially. It has the advantage of locally and repeatedly activating the getter by supplying a DC power to the micro-thin-film heater. Two models have been studied comparatively in this work, in which a conventional solid structure (SS) model with a micro-heater directly above a silica glass substrate was used as a reference model for comparison with the newly designed innovative floating structure (FS) model with a micro-heater floating over a cavity in a silicon substrate. According to a finite element method simulation based on Fourier’s law of heat conduction, the FS model showed better thermal efficiency than the SS model during the activation process. For a square micron thin-film getter with a size as 1000 × 1000 × 5 µm3, a rather low input voltage as 2 V can raise the temperature of the getter up to 300 °C calculated by the FS Model, while the SS model requires a much higher input voltage as 18 V to reach the same temperature.
Details
- Language :
- English
- ISSN :
- 21583226
- Volume :
- 12
- Issue :
- 1
- Database :
- Directory of Open Access Journals
- Journal :
- AIP Advances
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.2d8c0724dc804756b3f1f7184227d389
- Document Type :
- article
- Full Text :
- https://doi.org/10.1063/6.0001580