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Integrating a Physical Model with Multi-Objective Optimization for the Design of Optical Angle Nano-Positioning Mechanism

Authors :
Bo Jiang
Yiming Dong
Zijie Zhang
Xiangyu Li
Yuxuan Wei
Yifan Guo
Haixia Liu
Source :
Applied Sciences, Vol 14, Iss 9, p 3756 (2024)
Publication Year :
2024
Publisher :
MDPI AG, 2024.

Abstract

In light of recent advancements in synchrotron radiation technology and nano-technology, there has been a marked increase in the need for ultra-precision nano-positioning mechanisms. This paper presents a method that integrates physical models with multi-objective optimization for developing an optical angle nano-positioning mechanism. We begin by examining the actual motion law of the mechanism, based on kinematic principles. The outcomes from this kinematic analysis facilitate a static analysis of the flexible hinge, identified as a critical component of the mechanism. Subsequently, we establish a dynamic model for the entire mechanism. By employing the physical model as a base and combining it with the optimization algorithm, we identify the optimal design parameters for the mechanism. The design achieves a resolution of 50 nrad and meets the specified requirements. The first-order inherent frequency of the mechanism is approximately 43.75 Hz. There is a discrepancy of 2.63% from the finite element modal analysis results and a 3.33% difference from the theoretical analysis results, validating the reliability of the design method proposed in this study.

Details

Language :
English
ISSN :
20763417
Volume :
14
Issue :
9
Database :
Directory of Open Access Journals
Journal :
Applied Sciences
Publication Type :
Academic Journal
Accession number :
edsdoj.22f13675f561463db04a19b59e36279b
Document Type :
article
Full Text :
https://doi.org/10.3390/app14093756