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Integrating a Physical Model with Multi-Objective Optimization for the Design of Optical Angle Nano-Positioning Mechanism
- Source :
- Applied Sciences, Vol 14, Iss 9, p 3756 (2024)
- Publication Year :
- 2024
- Publisher :
- MDPI AG, 2024.
-
Abstract
- In light of recent advancements in synchrotron radiation technology and nano-technology, there has been a marked increase in the need for ultra-precision nano-positioning mechanisms. This paper presents a method that integrates physical models with multi-objective optimization for developing an optical angle nano-positioning mechanism. We begin by examining the actual motion law of the mechanism, based on kinematic principles. The outcomes from this kinematic analysis facilitate a static analysis of the flexible hinge, identified as a critical component of the mechanism. Subsequently, we establish a dynamic model for the entire mechanism. By employing the physical model as a base and combining it with the optimization algorithm, we identify the optimal design parameters for the mechanism. The design achieves a resolution of 50 nrad and meets the specified requirements. The first-order inherent frequency of the mechanism is approximately 43.75 Hz. There is a discrepancy of 2.63% from the finite element modal analysis results and a 3.33% difference from the theoretical analysis results, validating the reliability of the design method proposed in this study.
Details
- Language :
- English
- ISSN :
- 20763417
- Volume :
- 14
- Issue :
- 9
- Database :
- Directory of Open Access Journals
- Journal :
- Applied Sciences
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.22f13675f561463db04a19b59e36279b
- Document Type :
- article
- Full Text :
- https://doi.org/10.3390/app14093756