Vibration Mode Investigation of Piezoelectric Ultrasonic Microsensors on Buckled Diaphragms

Vibration mode of piezoelectric ultrasonic microsensors was investigated on buckled diaphragm structures from the viewpoint of higher order vibration modes than the fundamental one. Several vibration modes were generated on the diaphragms as the response to an ultrasound pulse, and their natural frequencies changed with increasing the buckling deflection in different rates. The natural frequencies of some modes approached each other, and the modes were accordingly superposed and degraded into a single mode in the large buckling ranges. The large buckling of the diaphragms consequently improves their vibration and thus the output waveforms.