Three-Dimensional Simulation Research on Discharge Characteristics of Inductively Coupled Plasma

Aiming at the discharge problem of inductively coupled plasma (ICP), a closed wave-transmitting cavi-ty configuration is designed, the fluid mechanics model of ICP is established, and the multi physical simulation software COMSOL is used for three-dimensional simulation research. The variation laws of typical parameters such as electron density, electron temperature and plasma potential with time in the discharge process are analyzed. On this basis, the power of radio frequency power supply, the air pressure in the cavity and other conditions are changed to obtain the parameter range and spatial gradient distribution of ICP. The results show that the discharge power mainly affects the numerical range of plasma parameters, and the change of air pressure has an effect on the numerical value and spatial distribution of plasma parameters. When the power of radio frequency power supply increases from 100 W to 300 W, the peak electron density increases from 2.54×1017 m-3 to 5.68×1017 m-3, and the electric potential induced in the heating zone and the corresponding electron temperature decrease slightly after the reaction is stable. Increasing the air pressure in the cavity within a certain range will significantly increase the electron density. The air pressure increases from 10 Pa to 30 Pa, and the electron density increases from 9.12×1017 m-3 to 3.62×1018 m-3. However, the uniformity of plasma parameter distribution will deteriorate if the air pressure is too high.