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Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar
- Source :
- Sensors, Vol 16, Iss 11, p 1880 (2016)
- Publication Year :
- 2016
- Publisher :
- MDPI AG, 2016.
-
Abstract
- Here, a silicon nanopillar array (Si-NPA) was fabricated. It was studied as a room-temperature organic vapour sensor, and the ethanol and acetone gas sensing properties were detected with I-V curves. I-V curves show that these Si-NPA gas sensors are sensitive to ethanol and acetone organic vapours. The turn-on threshold voltage is about 0.5 V and the operating voltage is 3 V. With 1% ethanol gas vapour, the response time is 5 s, and the recovery time is 15 s. Furthermore, an evaluation of the gas sensor stability for Si-NPA was performed. The gas stability results are acceptable for practical detections. These excellent sensing characteristics can mainly be attributed to the change of the overall dielectric constant of Si-NPA caused by the physisorption of gas molecules on the pillars, and the filling of the gas vapour in the voids.
- Subjects :
- ordered silicon nanopillar
organic vapour
gas sensing
Chemical technology
TP1-1185
Subjects
Details
- Language :
- English
- ISSN :
- 14248220
- Volume :
- 16
- Issue :
- 11
- Database :
- Directory of Open Access Journals
- Journal :
- Sensors
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.0edcb29dce7a475bb6b27a98dbe27d90
- Document Type :
- article
- Full Text :
- https://doi.org/10.3390/s16111880