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DEVICE FOR INVESTIGATION OF MAGNETRON AND PULSED-LASER PLASMA
- Source :
- Pribory i Metody Izmerenij, Vol 0, Iss 1, Pp 37-40 (2015)
- Publication Year :
- 2015
- Publisher :
- Belarusian National Technical University, 2015.
-
Abstract
- Various modifications of complex pulsed laser and magnetron deposition thin-film structures unit are presented. They include joint and separate variants of layer deposition. Unit realizes the plasma parameters control and enhances the possibility of laser-plasma and magnetron methods of coatings deposition.
Details
- Language :
- English, Russian
- ISSN :
- 22209506 and 24140473
- Issue :
- 1
- Database :
- Directory of Open Access Journals
- Journal :
- Pribory i Metody Izmerenij
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.031c124fd2514e8eae993251fcee69db
- Document Type :
- article