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Semiconductor layer growth by rapid themal chemical vapour deposition

Authors :
McNeill, David William
Publication Year :
1993
Publisher :
Queen's University Belfast, 1993.

Subjects

Subjects :
530.41
Polysilicon films

Details

Language :
English
Database :
British Library EThOS
Publication Type :
Dissertation/ Thesis
Accession number :
edsble.238986
Document Type :
Electronic Thesis or Dissertation

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