Acoustic and Electromagnetic Co-Modeling of Piezoelectric Devices at Millimeter Wave

This work reports the procedure for modeling piezoelectric acoustic resonators and filters at millimeter wave (mmWave). Different from conventional methods for lower frequency piezoelectric devices, we include both acoustic and electromagnetic (EM) effects, e.g., self-inductance, in both the circuit-level fitting and finite element analysis, toward higher accuracy at higher frequencies. To validate the method, thin-film lithium niobate (LiNbO3) first-order antisymmetric (A1) mode devices are used as the testbed, achieving great agreement for both the standalone resonators and a fifth-order ladder filter. Upon further development, the reported acoustic and EM co-modeling could guide the future design of compact piezoelectric devices at mmWave and beyond.
Comment: 6 pages, 11 figures, submitted to IEEE JMEMS