Ultra-Low-Loss Silicon Nitride Photonics Based on Deposited Films Compatible with Foundries

MLA

Ji, Xingchen, et al. Ultra-Low-Loss Silicon Nitride Photonics Based on Deposited Films Compatible with Foundries. 2023. EBSCOhost, https://doi.org/10.1002/lpor.202200544.

APA

Ji, X., Okawachi, Y., Gil-Molina, A., Corato-Zanarella, M., Roberts, S., Gaeta, A. L., & Lipson, M. (2023). Ultra-Low-Loss Silicon Nitride Photonics Based on Deposited Films Compatible with Foundries. https://doi.org/10.1002/lpor.202200544

Chicago

Ji, Xingchen, Yoshitomo Okawachi, Andres Gil-Molina, Mateus Corato-Zanarella, Samantha Roberts, Alexander L. Gaeta, and Michal Lipson. 2023. “Ultra-Low-Loss Silicon Nitride Photonics Based on Deposited Films Compatible with Foundries.” doi:10.1002/lpor.202200544.