Fabrication and characterization of suspended microstructures of ultrananocrystalline diamond

Authors :: Pachiu, C.
Sandu, T.
Tibeica, C.
Veca, L. M.
Popa, R.
Popescu, M.
Gavrila, R.
Popov, C.
Avramescu, V.
Source :: Romanian Journal of Information Science and Technology Volume 21, Number 1, 2018, 49-60
Publication Year :: 2021
Abstract: The fabrication of various suspended microstructures made from ultra-nanocrystalline diamond was performed without sacrificial layer. Arrays of bridges and cantilevers of various dimensions were successfully fabricated by a well-controlled process. Mechanical characterizations and finite element calculations allowed us to estimate both the Young's modulus as well as the residual stress built in the ultra-nanocrystalline diamond film.<br />Comment: 13 pages, 11 figures

Database :: arXiv
Journal :: Romanian Journal of Information Science and Technology Volume 21, Number 1, 2018, 49-60
Publication Type :: Report
Accession number :: edsarx.2111.02989
Document Type :: Working Paper

Tools