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Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators
- Source :
- Appl. Phys. Lett. 120, 102601 (2022)
- Publication Year :
- 2021
-
Abstract
- We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions. Slow deposition yields films with a high superconducting transition temperature ($9.20 \pm 0.06 \rm ~K$) as well as a residual resistivity ratio of $4.8$. We fabricate the films into coplanar waveguide resonators to extract the intrinsic loss due to the presence of two-level-system fluctuators using microwave measurements. For a coplanar waveguide resonator gap of $2~\mu \rm m$, the films exhibit filling-factor-adjusted two-level-system loss tangents as low as $1.5 \times 10^{-7}$ with single-photon regime internal quality factors in excess of one million after removing native surface oxides of the niobium.<br />Comment: 5 pages, 3 figures
Details
- Database :
- arXiv
- Journal :
- Appl. Phys. Lett. 120, 102601 (2022)
- Publication Type :
- Report
- Accession number :
- edsarx.2108.05354
- Document Type :
- Working Paper
- Full Text :
- https://doi.org/10.1063/5.0066441