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Reliable Nanofabrication of Single-Crystal Diamond Photonic Nanostructures for Nanoscale Sensing

Authors :
Radtke, Mariusz
Nelz, Richard
Slablab, Abdallah
Neu, Elke
Source :
Micromachines 2019, 10(11), 718
Publication Year :
2019

Abstract

In this manuscript, we outline a reliable procedure to manufacture photonic nanostructures from single-crystal diamond (SCD). Photonic nanostructures, in our case SCD nanopillars on thin (< 1$\mu$m) platforms, are highly relevant for nanoscale sensing. The presented top-down procedure includes electron beam lithography (EBL) as well as reactive ion etching (RIE). Our method introduces a novel type of inter-layer, namely silicon, that significantly enhances the adhesion of hydrogen silsesquioxane (HSQ) electron beam resist to SCD and avoids sample charging during EBL. In contrast to previously used adhesion layers, our silicon layer can be removed using a highly-selective RIE step which is not damaging HSQ mask structures. We thus refine published nanofabrication processes to ease a higher process reliability especially in the light of the advancing commercialization of SCD sensor devices.<br />Comment: v2: accepted for publication in Micromachines 2019, 10(11), 718; https://doi.org/10.3390/mi10110718

Details

Database :
arXiv
Journal :
Micromachines 2019, 10(11), 718
Publication Type :
Report
Accession number :
edsarx.1909.12011
Document Type :
Working Paper
Full Text :
https://doi.org/10.3390/mi10110718