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A self-aligned nano-fabrication process for vertical NbN-MgO-NbN Josephson junctions
- Source :
- Supercond. Sci. Technol. 30, 105002 (2017)
- Publication Year :
- 2017
-
Abstract
- We present a new process for fabricating vertical NbN-MgO-NbN Josephson junctions using self-aligned silicon nitride spacers. It allows for a wide range of junction areas from 0.02 um^2 to several 100 um^2. At the same time, it is suited for the implementation of complex microwave circuits with transmission line impedances ranging from < 1 Ohm to > 1 kOhm. The constituent thin films and the finished junctions are characterized. The latter are shown to have high gap voltages (> 4 mV) and low sub-gap leakage currents.<br />Comment: 5 pages, 3 figures, 3 tables
Details
- Database :
- arXiv
- Journal :
- Supercond. Sci. Technol. 30, 105002 (2017)
- Publication Type :
- Report
- Accession number :
- edsarx.1705.05608
- Document Type :
- Working Paper
- Full Text :
- https://doi.org/10.1088/1361-6668/aa8007