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Precision of Evaluation Methods in White Light Interferometry: Correlogram Correlation Method
- Publication Year :
- 2017
-
Abstract
- In this paper we promote a method for the evaluation of a surface topography which we call the correlogram correlation method. Employing a theoretical analysis as well as numerical simulations the method is proven to be the most accurate among available evaluation algorithms in the common case of uncorrelated noise. Examples illustrate the superiority of the correlogram correlation method over the common envelope and phase methods.<br />Comment: 10 pages, 9 figures
- Subjects :
- Physics - Instrumentation and Detectors
60H30
I.4.7
I.5.4
D.4.8
Subjects
Details
- Database :
- arXiv
- Publication Type :
- Report
- Accession number :
- edsarx.1703.05570
- Document Type :
- Working Paper
- Full Text :
- https://doi.org/10.1088/2051-672X/aa9459