Fabrication of Ultrathin Single-Crystal Diamond Membranes

Authors :: Fairchild, B. A.
Olivero, P.
Rubanov, S.
Greentree, A. D.
Waldermann, F.
Taylor, R. A.
Walmsley, I.
Smith, J. M.
Huntington, S.
Gibson, B. C.
Jamieson, D. N.
Prawer, S.
Source :: Advanced Materials 20 (24), 4793-4798 (2008)
Publication Year :: 2016
Abstract: We demonstrate the fabrication of sub-micron layers of single-crystal diamond suitable for subsequent processing as demonstrated by this test ring structure. This method is a significant enabling technology for nanomechanical and photonic structures incorporating colour-centres. The process uses a novel double implant process, annealing and chemical etching to produce membranes of diamond from single-crystal starting material, the thinnest layers achieved to date are 210 nm thick.<br />Comment: 21 pages, 4 figures